Waferpedia

Comparison ledger

0020 19652 PartversusR 301

Applied Materials 0020 19652 Part, Seren R 301, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
R 301Seren
OEMApplied MaterialsSeren
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartSeren R 301
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[1]Input Power:[2]
Output Power—300 Watts, 13.56 MHz[2]
Equipment type—RF generator[2]
Category—Lab & Support Equipment[3]
Maximum output power—300 Watts, 13.56 MHz[2]
Input power—90-140 OR 190-264 VAC[2]
Input frequency—47 - 63 Hz[2]
Maximum apparent power—750 VA Max[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com