Waferpedia

Comparison ledger

0020 19652 PartversusVHS 4

Applied Materials 0020 19652 Part, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
VHS 4Varian
OEMApplied MaterialsVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartVarian VHS
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[1]—
Pumping Speed—1200 l/s[2]
ASA Type Flange—9 in. OD, 5.9 in. ID[2]
Voltage—120V, 50/60 Hz[2]
Voltage/Frequency—120V, 50/60 Hz[2]
Type—High speed diffusion pump[3]
Inlet flange—9 in. OD, 5.9 in. ID[3]
Electrical requirements—120V, 50/60 Hz[2]
Cooling—Water cooled[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]yorkscientific.comyorkscientific.com