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Comparison ledger

0020 81665 PartversusSML 1500 25 25 Environmental

Applied Materials 0020 81665 Part, Thermotron SML 1500 25 25 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 81665 PartApplied Materials
OEMApplied MaterialsThermotron
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 81665 PartThermotron SML 1500 25 25 Environmental
Specifications
ConfigurationGuide, Fiber Mount, Ude, Lk[1]Air cooled[2]
Power—480V, 3Ph, 150 Amps[3]
Type—Environmental chamber[3]
Cooling—Air cooled[3]
Temperature control—Temperature control[3]
Humidity control—Humidity control[3]
Control system—Thermotron # 8800 touch screen control[2]
Software—Separate software required[2]
Recorder—Honeywell Truline recorder[2]
Temperature protection—Over and under temperature protection[2]
Included items—Viewing window, interior light, shelf[2]
Feed-thru ports—2X 6" Dia. opposing side feed-thru ports[2]
Access door—Left side access door[2]
Temperature range—-70 to +170* C[2]
Humidity range—10% to 98%[2]
OEM—Thermotron[2]
Model—SML 1500 25 25 Environmental[2]
Dimensions I.D.—52"W x 35"D x 47"H[4]
Dimensions O.D.—74"W x 91"D x 97"H[4]
Fast ramp—Fast Ramp[4]
Condenser—Remote Air Cooled Condenser Included[4]
Interior—Stainless steel interior[4]
Shelves—2 shelves[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]lre.comlre.com