Waferpedia

Comparison ledger

0041-39086 ESC PartversusAPM 011 InP ICP

Applied Materials 0041-39086 ESC Part, SPTS APM 011 InP ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsSPTS
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—SPTS APM 011 InP ICP
Specifications
Manufacturer—SPTS / STS[1]
Model—APM 011[1]
Tool type—InP ICP Etcher[1]
Vintage—2016[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing