Waferpedia

Comparison ledger

0041-39086 ESC Partversus701

Applied Materials 0041-39086 ESC Part, Tegal 701, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
701Tegal
OEMApplied MaterialsTegal
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tegal 701
Specifications
Equipment type—Plasma line RF plasma etcher[1]
Related equipment reference—Plasma line match tune network[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]semistarcorp.comsemistarcorp.com