Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusCeramic

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Lindberg Ceramic, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
CeramicLindberg
OEMApplied MaterialsLindberg
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lindberg Ceramic
Specifications
OEMApplied Materials[1]—
Model0242-36515[1]—
Tool typeRapid Thermal Process[1]—
CategoryThermal / Diffusion[2]—
Configuration—1400*C[3]
Maximum Temperature—1400°C[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing