Waferpedia

Comparison ledger

EV 200 Darkfieldversus.498 PSL Wafer

Applied Materials EV 200 Darkfield, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
EV 200 DarkfieldApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials EV 200 DarkfieldKLA .498 PSL Wafer
Specifications
Configurationnot working[1]NIST Traceable[3]
OEMApplied Materials[2]KLA[3]
ModelEV 200[2]—
NameEV 200 Darkfield[2]—
Wafer Sizes8 inch[2]—
Vintage2003[2]—
NIST traceability—Yes[3]
Category—Metrology & Inspection[3]
Traceability—Yes[3]
Description—Particle-sizing calibration standard[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com