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Comparison ledger

VIISta 810 XE Medium Currentversus160 XP

Applied Materials VIISta 810 XE Medium Current, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISta 810Varian 160 XP
Cited variants—
Specifications
ConfigurationHDD not included[2]—
OEMApplied Materials / Varian[2]—
ModelVIISta 810 XE[2]—
Tool typeMedium Current Implanter[2]—
CategoryIon Implantation[3]—
Missing partsE19283630 - Low Energy Lens PS; E16316820 - Cable Assy, W3011, Low Energy Lens; E16316860 Harness Assy, W017, Suppression Feedback[2]—
HDDnot included[3]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com