Comparison ledger
ASML PAS 5500 300 DUV, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PAS 5500 300 DUVASML | 017-0146-01 PrealignerBrooks |
|---|---|---|
| OEM | ASML | Brooks |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML PAS 5500 300 DUV | Brooks 017-0146-01 Prealigner |
| Specifications | ||
| Tool type | Deep ultraviolet (DUV) stepper[1] | — |
| Wavelength | 248 nm DUV[2] | — |
| Wafer size | 200 mm wafers[2] | — |
| Numerical aperture | Variable 0.40 - 0.57[2] | — |
| Resolution | < 250 nm[2] | — |
| Throughput | > 88 wph[2] | — |
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