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Comparison ledger

17099370 Outer strike plateversusE 1000 HP Ion

Axcelis 17099370 Outer strike plate, Varian E 1000 HP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateVarian E 1000 HP Ion
Specifications
ConfigurationUsed with Axcelis GSD 200[1]Leybold QDP-80, D8 Roughing Pumps[3]
ManufacturerAxcelis[2]—
Model17099370 Outer strike plate[1]E 1000 HP[4]
Part numberOEM number 17099370[2]—
Used withAxcelis GSD 200[1]—
ConditionNEW[2]—
Phase—3 Phase[3]
OEM—Varian[4]
Asset #—126887[4]
Wafer sizes—6, 8 inch[3]
Power—3 Phase[3]
Roughing pumps—Leybold QDP-80, D8 Roughing Pumps[3]
Cryo compressor—CTI 8250 Cryo Compressor (x2)[3]
Manuals—Included[3]
Vintage—1995[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing