Comparison ledger
Axcelis 200 MCU, SCREEN 80 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 MCUAxcelis | 80 BSCREEN |
|---|---|---|
| OEM | Axcelis | SCREEN |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SCREEN SK 80 |
| Specifications | ||
| Configuration | Single Chamber[1] | Main body[3] |
| Wafer Size | 8 inch (200 mm)[2] | — |
| Chamber Configuration | Single Chamber[1] | — |
| Vintage Year | 2000[2] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 MCU[1] | 80 B[3] |
| Tool type | Asher[1] | — |
| Wafer size | 8 inch[1] | — |
| Make | — | SCREEN / DNS[3] |
| Equipment type | — | Coater / Developer[3] |
| Included items | — | Main body; accessory equipment; AC unit and ETU; support cabinet and power[3] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →