Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SUSS MicroTec Gamma Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gamma SpraySUSS MicroTec | |
|---|---|---|
| OEM | Axcelis | SUSS MicroTec |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SUSS MicroTec GAMMA |
| Specifications | ||
| Configuration | 14 Amps[1] | Spray coater modules (2)[4] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Manufacturer | Axcelis[3] | — |
| Model | 200 PCU[3] | Gamma[5] |
| Tool type | photoresist stabilizer[3] | — |
| Category | Resist Processing[3] | — |
| Power | 14 Amps[1] | — |
| Equipment type | — | Spray coater[5] |
| Make | — | SUSS[5] |
| Listed contents | — | Spray coater modules (2), developer (1), power supply, auxiliary parts[4] |
| Family | — | Gamma family[5] |
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