Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SVG 8626, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8626SVG | |
|---|---|---|
| OEM | Axcelis | SVG |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SVG 8626 |
| Specifications | ||
| Configuration | 14 Amps[1] | Cassette to cassette[4] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Manufacturer | Axcelis[3] | — |
| Model | 200 PCU[3] | 8626[4] |
| Tool type | photoresist stabilizer[3] | — |
| Category | Resist Processing[3] | — |
| Power | 14 Amps[1] | — |
| OEM | — | SVG[4] |
| Wafer size | — | 6 inch[4] |
| Coat stages | — | 2 coat[4] |
| Excludes | — | Pumps[4] |
| Process | — | 2 coat[4] |
| Includes | — | Excludes pumps[4] |
| Facility equipment listing | — | SVG 8626 6" Lift-Off resist and BARC Coat Track[5] |
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