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Comparison ledger

18 D Surfaceversus841 Back

Blanchard 18 D Surface, Disco 841 Back, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
18 D SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 18 D SurfaceDisco 841 Back
Specifications
Voltage416 V[1]—
Phase3 Phase[1]—
Cycles50[1]—
Control Voltage110[1]—
MakeBlanchard[2]—
Model18 D[2]—
Asset #153970[1]—
Power416 V, 3 phase[2]—
Wafer size range—4 to 8 inches (100-200 mm)[4]
Grinding type—In-feed grinding with wafer rotation[4]
Number of spindles—2[4]
Spindle speed range—1000-7000 rpm[4]
Vertical stroke—110 mm[4]
Chuck table type—Porous chuck table with vacuum chuck[4]
Grinding wheel diameter—8 inches[4]
Cassette capacity—Two cassettes for loading/unloading[4]
Planarity accuracy (within wafer)—0.0015 mm[4]
Compliance—EC CE marking and SEMI S2-93 (DFG841)[4]
Dimensions (W x D x H)—1050 mm x 2150 mm x 1710 mm[4]
Electrical requirements—200V, 3 Phase, 50/60 Hz[4]
CDA pressure—0.5-0.8 MPa[4]
DI water pressure and flow—0.2-0.3 MPa, 15 l/min or higher[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]s3-alliance.coms3-alliance.com