Waferpedia

Comparison ledger

0 500versus1913 MK III Nitrogen

Blue M 0 500, Heller 1913 MK III Nitrogen, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Heller 1913
Specifications
ManufacturerBlue M[1]—
Model0 500[1]1913 MK III[3]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]nitrogen oven[3]
Configuration—Has 400 Degrees Celsius Max[2]
Maximum temperature—400 degrees Celsius[2]
Category—Thermal / Diffusion[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com