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Comparison ledger

8850 D-1 Boxversus0332 F 9453 302 Diffusion

Blue M 8850 D-1 Box, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBlue MVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 8850 D-1 BoxVarian 0332 F 9453 302 Diffusion
Specifications
Max temp1093 degree C[1]—
Voltage480V[2]—
Configuration3 Ph[1]—
Frequency60 Hz[2]—
TypeBox furnace[2]—
CategoryThermal / Diffusion[2]Thermal / Diffusion[5]
Phase3 Ph[2]—
Max temperature1093 degree C[2]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]
Make—Varian[3]
Model—0332 F 9453 302[3]
Tool type—diffusion pump[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com
  5. [5]waferpedia.comwaferpedia.com