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017-0024-01 PrealignerversusNNSR S 204 B

Brooks 017-0024-01 Prealigner, Nikon NNSR S 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NNSR S 204 B
Specifications
Configuration—KrF[1]
Manufacturer—Nikon[2]
Model—NNSR S 204 B[2]
Equipment type—Scanner[1]
Category—Lithography[1]
Wafer sizes—8 inch[2]
Vintage—2000[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing