Comparison ledger
Brooks 017-0024-01 Prealigner, Nikon S 308 F, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | S 308 FNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Nikon S 308 F |
| Specifications | ||
| Configuration | — | HDD included[1] |
| Light source | — | ArF (193 nm)[2] |
| Numerical aperture | — | 0.92[2] |
| Exposure area | — | 26 x 33 mm[2] |
| Reduction ratio | — | 1:4[2] |
| Resolution | — | <65 nm[2] |
| Throughput (300 mm) | — | >145 wph[2] |
| Throughput (200 mm) | — | >165 wph[2] |
| Wafer size | — | 200/300 mm[2] |
| Overlay accuracy | — | 8 nm[2] |
| Polarization control | — | POLANO[2] |
| Wafer size (alternative) | — | 12 inch[1] |
| Wavelength | — | 193 nm[2] |
| Lens NA | — | 0.92[2] |
| Polarization Control | — | POLANO (optional)[2] |
| Model | — | S 308 F[1] |
| Alternate model name | — | NSR-S308F[2] |
| Category | — | Lithography[3] |
| Tool type | — | Deep ultraviolet (ArF) lithography scanner[4] |
| Wafer sizes | — | 200 mm and 300 mm[2] |
| HDD included | — | included[1] |
| Asset number | — | 154627[1] |
| Last confirm date | — | May 20, 2026[1] |
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