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Comparison ledger

017-0024-01 PrealignerversusSK 80 BW BVPE Resist

Brooks 017-0024-01 Prealigner, SCREEN SK 80 BW BVPE Resist, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBrooksSCREEN
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSCREEN SK 80
Specifications
Configuration—Single Block[1]
Manufacturer—SCREEN[2]
Model—SK 80 BW BVPE[1]
Equipment type—Resist coater/developer[1]
Wafer size—8 inch[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com