Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2005 i 12 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR 2005 i 12 i-LineNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer Loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2005 |
| Specifications | ||
| Control System | — | VAX Station[1] |
| Configuration | — | Modules:[1] |
| Wafer size | — | Wafer Loader[1] |
| AC Power Distribution System | — | Electricity Box[1] |
| Make | — | Nikon[1] |
| Model | — | NSR 2005 i 12[1] |
| Wafer Sizes | — | 6 inch[1] |
| Modules | — | Operation Panel; Retical Loader; Wafer Loader; AC Power Distribution System; Electricity Box[1] |
| Stepper type | — | i-Line[1] |
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