Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 650 S Flat Panel Exposure, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 650 S Flat Panel Exposure |
| Specifications | ||
| Configuration | — | 20" panel[1] |
| OEM | — | OAI[1] |
| Model | — | 650 S[1] |
| Equipment type | — | Flat Panel Exposure System[1] |
| Panel capacity | — | 20-inch panel[1] |
| Substrate capacity | — | Substrates up to 20 inches square[2] |
| Originally for | — | Flat panel display substrates[2] |
| Supported smaller mask sizes | — | 4-inch and 6-inch rounds, 5-inch square[2] |
| Feature size | — | Below 2 μm[2] |
| Line width | — | ~ 1.5 μm[2] |
| Lamp installed | — | Used 2000W lamp installed; one spare[2] |
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