Comparison ledger
Brooks 017-0146-01 Prealigner, OAI Model 800E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | Model 800EOAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI Model 800E |
| Specifications | ||
| Product category | — | Mask aligner[1] |
| Operation mode | — | Semi-automatic[2] |
| Exposure sides | — | Frontside and backside[2] |
| Feature level | — | Advanced features and specifications found most often in costly automated production mask aligners[2] |
| System type | — | Front & backside semi-automatic mask aligner[3] |
| Platform | — | Built on OAI's modular platform[3] |
| Control system | — | Windows 10 control and recipe storage[4] |
| Alignment stages | — | Joystick-controlled alignment and optics stages[3] |
| Exposure modes | — | Vacuum contact, hard contact, soft contact, proximity[4] |
| Substrate size | — | Up to 8" square[4] |
| Mask size | — | Up to 9" x 9"[4] |
| Alignment cameras | — | Dual 1 MP GIGE CCD cameras; 4 total in backside configuration[4] |
| Wedge correction | — | Non-contact 3-point wedge effect correction / auto wedge effect compensation[4] |
| Optics | — | OAI Advanced Beam Optics[3] |
| UV source | — | High-intensity broadband Hg/Hg-Xe arc lamp (320-450 nm)[5] |
| Beam uniformity | — | Exceptional uniformity[3] |
| Resolution | — | Sub-micron capability with optimized resist and process[5] |
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