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Comparison ledger

Apex II Single Crystalversus1.112 PSL Wafer

Bruker Apex II Single Crystal, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker Apex II Single CrystalKLA 1.112 PSL Wafer
Specifications
ConfigurationNeeds new tube and work on communication card[1]NIST Traceable[3]
TypeSingle-crystal X-ray diffractometer[1]—
ManufacturerBruker[1]—
DetectorAPEX II CCD Detector[2]—
SourceCu Microsource[2]—
Low-temperature deviceOxford Cryosystem 700 Plus[2]—
Data collection temperature range80 - 320 K[2]—
Goniometer platformPlatform Goniometer[2]—
Wafer Size—8 inch[3]
NIST Traceable—True[3]
Compatible Tools—Surfscan 6xy0 and Sp1[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]cif.iastate.educif.iastate.edu
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com