Waferpedia

Comparison ledger

Ecomet 3versus100R16

Buehler Ecomet 3, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Ecomet 3Buehler
100R16Strasbaugh
OEMBuehlerStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Ecomet 3Strasbaugh 100R16
Specifications
Configuration100-115 Volts[1]—
Product typeGrinder / Polisher[2]—
Voltage100-115 Volts[1]—
Frequency50/60 Hz[1]—
PhaseSingle phase[1]—
type—1 spindle grinder/polisher[3]
drive system—DC drive system with 2 motors[3]
spindle RPM—1-180 RPM[3]
eccentric RPM—1-90 RPM[3]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[3]
capacity—16 inches[3]
spindle size—1-8 TPI[3]
overall dimensions—28 inches x 36 inches x 48 inches[3]
weight—500 lbs[3]
origin—made in the USA[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]excelltechnology.comexcelltechnology.com