Waferpedia

Comparison ledger

R 6100versus03 RR 8120-001-001 Wafer Exchanger

Cascade Microtech R 6100, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
R 6100Cascade Microtech
OEMCascade MicrotechRorze
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech R 6100Rorze 03 RR 8120-001-001 Wafer Exchanger
Specifications
ConfigurationThermal chuck  plus X/Y/Z/θ servos[1]—
MakeCascade Microtech[1]—
ModelR 6100[1]03 RR 8120-001-001[3]
Wafer sizes8 inch[1]—
Travel8-inch travel[2]—
ResolutionSub-micron resolution[2]—
Motion controlPrecise motion control[2]—
Wafer size—8 inch[3]
Manufacturer—Rorze[3]
Equipment type—Wafer Exchanger[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com