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321versusDFD 6450 Fully Automatic Dicing

Disco 321, Disco DFD 6450 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco DFD 6450 Fully Automatic Dicing
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Max workpiece size—φ8 inch[4]
X-axis cutting range—250 mm[4]
Cutting speed—0.1 – 600 mm/s[4]
Y1-axis cutting range—250 mm[4]
Y1-axis index step—0.0001 mm[4]
Y1-axis positioning accuracy—Within 0.003/250 mm (single error)[4]
Y2-axis cutting range—30 mm[4]
Y2-axis index step—0.0001 mm[4]
Y2-axis positioning accuracy—Within 0.002/30 mm[4]
Z-axis max stroke—35.2 mm[4]
Z-axis moving resolution—0.00005 mm[4]
Z-axis repeatability accuracy—0.001 mm[4]
θ-axis max rotating angle—380 deg[4]
Spindle rated output (1.0 kW)—1.0 kW[4]
Spindle rated torque (1.0 kW standard)—0.16 N·m[4]
Spindle rotation speed range (1.0 kW standard)—6,000 – 60,000 min⁻¹[4]
Spindle rated output (2.2 kW)—2.2 kW[4]
Spindle rated torque (2.2 kW)—0.7 N·m[4]
Spindle rotation speed range (2.2 kW)—3,000 – 30,000 min⁻¹[4]
Equipment dimensions (W×D×H)—1,120 × 1,500 × 1,600 mm[4]
Equipment weight—Approx. 1,400 kg[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]disco.co.jpdisco.co.jp