Waferpedia

Comparison ledger

EPX 180 NE High Vacuum TurboversusEPX 500 NE Dry

Edwards EPX 180 NE High Vacuum Turbo, Edwards EPX 500 NE Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
EPX 180 NE High Vacuum TurboEdwards
EPX 500 NE DryEdwards
OEMEdwardsEdwards
Category—Lab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEdwards EPXEdwards EPX
Specifications
Configuration200 / 208V[1]200/208 Volts[2]
OEMEdwards[1]Edwards[3]
ModelEPX 180 NE[1]EPX 500 NE[3]
Equipment typeHigh Vacuum Turbo Pump[1]Dry pump[3]
Power200 / 208V[1]200/208 Volts[3]
Frequency50/60 Hz[1]50/60 Hz[3]
Current16 Amps[1]16 amps[3]
ControlIntegrated Display & Control Panel[1]—
Gas deliveryHigh Temp Gas Purge Assembly[1]—
Mounting/baseMetric Eyebolt / Heavy Duty Mount Base[1]—
Vintage2008 Vintage[1]—
Electrical—200/208 volts[2]
EPX 180 NE High Vacuum Turbo entryEPX 500 NE Dry entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com