Comparison ledger
EV Group 120 Automated Coater Processing, SVG 8626, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | 8626SVG |
|---|---|---|
| OEM | EV Group | SVG |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | SVG 8626 |
| Specifications | ||
| Configuration | 50/60 Hz[1] | Cassette to cassette[2] |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| OEM | — | SVG[2] |
| Model | — | 8626[2] |
| Wafer size | — | 6 inch[2] |
| Coat stages | — | 2 coat[2] |
| Excludes | — | Pumps[2] |
| Process | — | 2 coat[2] |
| Includes | — | Excludes pumps[2] |
| Facility equipment listing | — | SVG 8626 6" Lift-Off resist and BARC Coat Track[3] |
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