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Comparison ledger

Gemini Automated Production FusionversusELP300 Gen2

EV Group Gemini Automated Production Fusion, SUSS MicroTec ELP300 Gen2, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
ELP300 Gen2SUSS MicroTec
OEMEV GroupSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size300mm300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2014 Launch announcement
Control system——
Generation—Gen2
FamilyEV Group Gemini AutomatedSUSS MicroTec ELP300 Gen2
Specifications
ConfigurationInterlocked doors with signal light tower[1]—
Wafer Size12"/300mm[1]up to 300 mm[2]
Alignment ModuleSmartView NT with 5x objectives[1]—
Robot4-Axis Industrial Robot[1]—
SoftwareEVG CIM Framework Software GUI[1]—
CertificationCE Certified[1]—
Wafer LoadingFOUP loading with empty/present sensor[1]—
Automation—Automated[2]
Laser Type—Excimer Laser[2]
Processes—Alignment, Ablation, Laser-Assisted Debonding, Laser Seed Layer Removal[2]
Optics / laser type—Excimer Laser[3]
Wafer handling configuration—Configured for handling both 200 mm and 300 mm wafers[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]hilpert.chhilpert.ch
  3. [3]waferpedia.comwaferpedia.com
  4. [4]kipost.netkipost.net