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Comparison ledger

1705 EXLversus0332 F 9453 302 Diffusion

Heller 1705 EXL, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1705 EXLHeller
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1705 EXLVarian 0332 F 9453 302 Diffusion
Specifications
ConfigurationNon-functional[1]—
ManufacturerHeller[2]—
Model1705 EXL[1]0332 F 9453 302[4]
Tool typeReflow oven[2]diffusion pump[6]
CategoryThermal / Diffusion[2]Thermal / Diffusion[6]
ConditionNon-functional[1]—
Electrical specification208-240 VAC, 3-phase, 100A[3]—
ConveyorsEdge rail & mesh belt conveyors[3]—
ZonesFive zones[3]—
Specification134" total length[3]—
Serial number0103D2A2A1-34448-01[3]—
VintageJAN 2003[3]—
Hours19,157[3]—
Asset Number—142841[4]
Last Confirm Date—October 14, 2025[5]
Make—Varian[4]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]ibesmt.comibesmt.com
  4. [4]Equipment inventory listing
  5. [5]fab-spares.comfab-spares.com
  6. [6]waferpedia.comwaferpedia.com