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1305 BSG 3versusSEZ DV Prime

Hitachi 1305 BSG 3, Lam Research SEZ DV Prime, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
SEZ DV PrimeLam Research
OEMHitachiLam Research
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Lam Research SEZ
Cited variants—
  • Lam / SEZ DV Prime Wet Station, 12"[1]
Specifications
Configuration—Chambers (8)[2]
Make / OEM—Lam / SEZ[2]
Model—DV Prime[2]
Equipment type—Wet station[2]
Wafer size—12 inch[2]
Chambers—8[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing