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1305 BSG 3versusSS 3000 AR

Hitachi 1305 BSG 3, SCREEN SS 3000 AR, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
SS 3000 ARSCREEN
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SCREEN SS 3000
Cited variants—
  • SCREEN / DNS SS 3000 AR - 4 Back - Includes HDD[1]
  • SCREEN / DNS SS 3000 AR Scrubber - 2F/2B - Including HDD[2]
  • SCREEN / DNS SS 3000 AR Scrubber - Not including HDD[3]
  • SCREEN / DNS SS 3000 AR Scrubber - No HDD[4]
  • SS 3000 AR[2]
Specifications
Configuration—4 Back[1]
Model—SS 3000 AR[1]
OEM—SCREEN / DNS[1]
Type—Scrubber[2]
Vintage—2005[2]
HDD—Includes HDD[1]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing