Comparison ledger
Hitachi 1305 BSG 3, Veeco NT 3300 SU 2D 3D Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Veeco NT 3300 |
| Specifications | ||
| Configuration | — | 200mm Stage with Encoders[1] |
| Make | — | Veeco / Wyko[1] |
| Model | — | NT 3300 SU[1] |
| Wafer Sizes | — | 6, 8 inch[1] |
| Stage | — | 200mm stage with encoders[1] |
| Motorized XYZ | — | Yes[1] |
| Motorized Turret | — | Yes[1] |
| Auto Focus | — | Yes[1] |
| Stitching | — | Yes[1] |
| Full Automation Capability | — | Yes[1] |
| Resolution | — | Sub-nanometer[1] |
| Z-range | — | Large Z-range[1] |
| Characterization | — | 2D and 3D characterization and visualization[1] |
| Gauge-capable | — | Yes[1] |
| Range Automation | — | Yes[1] |
| Measure Optics | — | Measure Optics[2] |
| Wafer sizes | — | 6 inch, 8 inch[1] |
| Motion | — | Motorized XYZ[1] |
| Turret | — | Motorized turret[1] |
| Focus | — | Auto focus[1] |
| Automation | — | Full automation capability[1] |
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