Comparison ledger
Hitachi S 3700 N VP-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 3700 N VP-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 3700 N | KLA .496 PSL Wafer |
| Specifications | ||
| EDS | Yes EDAX/ Model: Apollo XP[1] | — |
| Configuration | Detectors:[1] | NIST Traceable[3] |
| Accessories | Carbon Coater (VC-100)[1] | — |
| Tool type | Variable pressure scanning electron microscope[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Wafer size | 8 inch[1] | 8 inch[3] |
| EDS model | EDAX Apollo XP[1] | — |
| Detector | Everhart thornley secondary electron detector[1] | — |
| Operating system | SEM/Windows 7, EDX/Windows 7[1] | — |
| Accessory | Carbon Coater (VC-100)[1] | — |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
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