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S 9260 A CD-SEMversus1.112 PSL Wafer

Hitachi S 9260 A CD-SEM, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
S 9260 A CD-SEMHitachi
1.112 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 9260KLA 1.112 PSL Wafer
Specifications
ConfigurationSingle phase[1]NIST Traceable[5]
MakeHitachi[2]—
ModelS 9260 A[2]—
Wafer Size8 inch[1]8 inch[5]
Power ConfigurationSingle phase[1]—
OEMHitachi[2]—
Tool typeCritical Dimension Scanning Electron Microscope (CD-SEM)[2]—
Vintage2007[2]—
NIST Traceable—True[5]
Compatible Tools—Surfscan 6xy0 and Sp1[6]
S 9260 A CD-SEM entry1.112 PSL Wafer entryAsk about these tools →Share experience with this comparison →

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com