Comparison ledger
Hitachi TM 1000 Tabletop, Hitachi TM 3030 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TM 1000 TabletopHitachi | TM 3030 PlusHitachi |
|---|---|---|
| OEM | Hitachi | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2014– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi TM | Hitachi TM |
| Specifications | ||
| Configuration | Windows 10 operating system[1] | Desktop[5] |
| Magnification | 20 x-10,000 x[1] | — |
| Accelerating voltage | 15kV[2] | — |
| Observation mode | Standard mode/charge-up reduction mode[2] | — |
| Specimen traverse | X:15 mm, Y:18 mm[2] | — |
| Maximum sample size | 70mm in diameter[2] | Up to 70 mm diameter and 50 mm thickness[7] |
| Maximum sample thickness | 20mm[2] | — |
| Electron gun | Pre-centered cartridge filament[2] | — |
| Detection system | High-sensitive semiconductor BSE detector[2] | — |
| Auto image adjustment function | Autostart, Autofocus, AutoBrightness[2] | — |
| Frame memory | 640 x 480 pixels, 1,280 x 960 pixels[2] | — |
| Image data memory | HDD of PC and other recording medium[2] | — |
| Image format | BMP, TIFF, JPEG[3] | — |
| Data display | Micron marker, Micron value, date and time, image number comments[2] | — |
| Evacuation system (vacuum pump) | Turbomolecular pump: 30L/s x 1 unit, Diaphragm pump: 1m3/h x 1 unit[2] | — |
| Safety device | Over-current protection function[2] | — |
| Main unit dimensions | 338(W) x 564(D) x 513(H)mm[2] | — |
| Main unit weight | 58.5kg[2] | — |
| Control unit dimensions | 140(W) x 564(D) x 513(H)mm[2] | — |
| Control unit weight | 23.0kg[2] | — |
| Diaphragm pump dimensions | 145(W) x 256(D) x 217(H)mm[2] | — |
| Diaphragm pump weight | 4.5kg[2] | — |
| Installation room temperature | 15~30°C[2] | — |
| Installation humidity | 70%RH or less[2] | — |
| Power source | Single-phase AC 100,110,115,200,220 or 240V(±10%), 500VA[2] | — |
| Grounding | 100Ω or better[2] | — |
| PC OS | Windows XP Home Edition (SP2)[2] | — |
| PC CPU | Intel Celeron M340 or better (or compatible CPU)[2] | — |
| PC memory | 256MB or larger[2] | — |
| PC display | 15"[2] | — |
| PC interface connector | USB 2.0[2] | — |
| Required PC specifications (catalog) | OS Windows XP Home Edition (SP2); CPU Intel Celeron M340 or better; Memory 512MB or larger; Display 15.4 type WXGA 1,280 x 800 pixels; Interface USB 2.0[3] | — |
| Time to image after sample exchange | 3 minutes[3] | — |
| Power consumption vs predecessor | 80% less power consumption than the predecessor[3] | — |
| Optional EDX | SwiftED-TM Energy Dispersive X-ray Spectrometer dedicated for TM-1000 Tabletop Microscope[4] | — |
| Type | — | Desktop scanning electron microscope[5] |
| Detector | — | Premium SE Detector[5] |
| EDS | — | No EDS[5] |
| Operating voltages | — | 5 kV, 15 kV[6] |
| Detectors | — | SE, BSE, mix[6] |
| Modes | — | regular, charge reduction[6] |
| Maximum magnification | — | 60,000x[6] |
| Technique | — | Scanning Electron Microscopy (SEM)[7] |
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