Comparison ledger
Hitachi TM 1000 Tabletop, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TM 1000 TabletopHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi TM | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | Windows 10 operating system[1] | NIST Traceable[5] |
| Magnification | 20 x-10,000 x[1] | — |
| Accelerating voltage | 15kV[2] | — |
| Observation mode | Standard mode/charge-up reduction mode[2] | — |
| Specimen traverse | X:15 mm, Y:18 mm[2] | — |
| Maximum sample size | 70mm in diameter[2] | — |
| Maximum sample thickness | 20mm[2] | — |
| Electron gun | Pre-centered cartridge filament[2] | — |
| Detection system | High-sensitive semiconductor BSE detector[2] | — |
| Auto image adjustment function | Autostart, Autofocus, AutoBrightness[2] | — |
| Frame memory | 640 x 480 pixels, 1,280 x 960 pixels[2] | — |
| Image data memory | HDD of PC and other recording medium[2] | — |
| Image format | BMP, TIFF, JPEG[3] | — |
| Data display | Micron marker, Micron value, date and time, image number comments[2] | — |
| Evacuation system (vacuum pump) | Turbomolecular pump: 30L/s x 1 unit, Diaphragm pump: 1m3/h x 1 unit[2] | — |
| Safety device | Over-current protection function[2] | — |
| Main unit dimensions | 338(W) x 564(D) x 513(H)mm[2] | — |
| Main unit weight | 58.5kg[2] | — |
| Control unit dimensions | 140(W) x 564(D) x 513(H)mm[2] | — |
| Control unit weight | 23.0kg[2] | — |
| Diaphragm pump dimensions | 145(W) x 256(D) x 217(H)mm[2] | — |
| Diaphragm pump weight | 4.5kg[2] | — |
| Installation room temperature | 15~30°C[2] | — |
| Installation humidity | 70%RH or less[2] | — |
| Power source | Single-phase AC 100,110,115,200,220 or 240V(±10%), 500VA[2] | — |
| Grounding | 100Ω or better[2] | — |
| PC OS | Windows XP Home Edition (SP2)[2] | — |
| PC CPU | Intel Celeron M340 or better (or compatible CPU)[2] | — |
| PC memory | 256MB or larger[2] | — |
| PC display | 15"[2] | — |
| PC interface connector | USB 2.0[2] | — |
| Required PC specifications (catalog) | OS Windows XP Home Edition (SP2); CPU Intel Celeron M340 or better; Memory 512MB or larger; Display 15.4 type WXGA 1,280 x 800 pixels; Interface USB 2.0[3] | — |
| Time to image after sample exchange | 3 minutes[3] | — |
| Power consumption vs predecessor | 80% less power consumption than the predecessor[3] | — |
| Optional EDX | SwiftED-TM Energy Dispersive X-ray Spectrometer dedicated for TM-1000 Tabletop Microscope[4] | — |
| Wafer size | — | 8 inch[5] |
| Traceability | — | NIST Traceable[5] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[5] |
| Category | — | Metrology & Inspection[6] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →