Comparison ledger
KLA 1.112 PSL Wafer, KLA Alpha Step 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Alpha Step |
| Specifications | ||
| Configuration | NIST Traceable[1] | 6” Vacuum test chuck[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Type | — | Profilometer[3] |
| Chuck | — | 6-inch vacuum test chuck[3] |
| Power | — | 90-130 VAC, 50/60 Hz, 120 VA max[3] |
| Measurement functions | — | Step heights, etch depths, coating thicknesses, micro-roughness, and other high-precision surface characteristics[4] |
| Instrument description | — | Stylus-based surface profiler[4] |
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