Comparison ledger
KLA 1.112 PSL Wafer, KLA Archer 300 Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Archer |
| Specifications | ||
| Configuration | NIST Traceable[1] | Refurbished[3] |
| Wafer Size | 8 inch[1] | 300mm (12 inch)[3] |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Supported Wafer Sizes | — | 150mm – 300mm[4] |
| Substrate Support | — | Si, SiC, GaN, quartz, glass, GaAs and other transparent wafers[4] |
| Throughput | — | High (no numeric value provided)[4] |
| Thin Wafer Handling | — | Optional, down to 350μm[4] |
| Thick Wafer Handling | — | Optional, up to 1200μm[4] |
| Alignment System | — | Advanced Alignment Microscope System (AMS) with three LEDs[4] |
| Variable Illumination | — | Variable Illumination System (VIS) with colored filters[4] |
| Optional Features | — | ANRA, CPM, AIM targets, 5D Analyzer, Recipe Database Manager[4] |
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