Comparison ledger
KLA 1.112 PSL Wafer, KLA Surfscan 6220 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Surfscan 6220 |
| Specifications | ||
| Configuration | NIST Traceable[1] | with MSP 2300 + SMIF Opener[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Wafer size (metric) | — | 200 mm[4] |
| Wafer size (inches) | — | 8 in[5] |
| System type | — | Wafer Inspection System[3] |
| Included components | — | MSP 2300, SMIF opener, auxiliary cabinet, Crest tabletop unit, chiller, pumps, control PC[3] |
| OEM | — | KLA[3] |
| Model | — | Surfscan 6220[3] |
| Equipment type | — | Wafer Inspection System[3] |
| Version | — | 200 mm[4] |
| Manufacturer | — | KLA[3] |
| Related system series | — | Surfscan 6100 and Surfscan 62X0 Series[6] |
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