Comparison ledger
KLA 1.112 PSL Wafer, Nikon Optiphot 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Optiphot 200Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Nikon Optiphot |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Model | — | Optiphot 200[4] |
| Type | — | Semiconductor wafer inspection microscope[5] |
| Illumination | — | Brightfield / Darkfield[5] |
| Stage | — | 8" x 8" mechanical stage[5] |
| Eyepieces | — | 10x[5] |
| Objective lenses | — | Nikon CF Plan 5x, 10x, 20x[5] |
| Turret | — | Motorized with controller[5] |
| Adjustment | — | Coarse / Fine[5] |
| Microscope head | — | Trinocular head[5] |
| Electrical requirements | — | 120V / 60Hz / 15A / 1Ph[5] |
| Designation at EPFL | — | Inspection microscope[6] |
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