Comparison ledger
KLA 1.112 PSL Wafer, Olympus MX 50 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX 50 OpticalOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Olympus MX 50 Optical |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Stage travel | — | 154x154 mm[3] |
| Maximum wafer diameter | — | 6 inch (150 mm)[3] |
| Motorized focus | — | Available (PS3H122R + H807 or H122KBIX)[3] |
| Autofocus | — | Available (PF850 standalone hardware autofocus)[3] |
| Microscope type | — | Upright[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →