Comparison ledger
KLA 1.112 PSL Wafer, Veeco NT 8000 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT 8000 OpticalVeeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2005– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Veeco NT 8000 Optical |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Stage | — | 8 x 8 stage controlled by Galil 5-axis stage controller[3] |
| Computer | — | Nixsystem G5 computer running Windows 7[3] |
| Software | — | Vision 3.6 with advanced analysis, data storage testing and stitching[3] |
| Objectives | — | Motorized 4-place turret with 5x and 50x objectives[3] |
| Field of view (FOV) lenses | — | Alignment lenses with magnifications of 0.55x, 1x, and 2x[3] |
| Isolation | — | Built-in TMC isolation stand[3] |
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