Comparison ledger
KLA 1.112 PSL Wafer, Zeiss EVO 50 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EVO 50 VPZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss EVO 50 VP |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage | — | 30 kV[3] |
| Type | — | Scanning electron microscope (SEM)[4] |
| Capability | — | Variable pressure[3] |
| Accelerating voltage | — | 30 kV[3] |
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