Comparison ledger
KLA 2135, KLA MicroSense UMSC 200 BT Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2135KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2135 | KLA MicroSense |
| Specifications | ||
| Product type | wafer inspection system[1] | — |
| Technology | advanced sensor and image processing technologies[1] | — |
| Inspection method | brightfield, small-pixel, high data rate, digital image processing technology[1] | — |
| Defect detection | detects all types of yield-relevant defects on all process layers[1] | — |
| Operational use | in-line monitoring of advanced processes[1] | — |
| Throughput | two- to three-times throughput improvement over the earlier model KLA 2132[1] | — |
| Inspection technology | brightfield, small-pixel, high data rate, digital image processing technology[1] | — |
| Throughput improvement over KLA 2132 | two to three times[1] | — |
| Laser type | 193nm DUV laser[2] | — |
| Laser output power | 200W[2] | — |
| Objective NA | 0.95[2] | — |
| Scan speed | 120 mm/sec[2] | — |
| Power supply input | 3-phase 480V[2] | — |
| Power supply output | 12V DC[2] | — |
| Target process node | 90nm–28nm[2] | — |
| Configuration | — | 10 A[3] |
| Voltage | — | 120 V[3] |
| Main Air Pressure | — | 50 PSI[3] |
| Stage Air Pressure | — | 5 Psi[3] |
| Measurement Type | — | Flatness & Thickness[3] |
| System Type | — | Non-contact Measurement[3] |
| Frequency | — | 50/60 Hz[3] |
| Vintage year | — | 2015[3] |
| Measurement features | — | High-precision flatness measurement; accurate thickness analysis; non-contact sensor technology; automated data collection; real-time measurement display[3] |
| Control features | — | Pneumatic control system; emergency stop functionality; pressure monitoring gauges; user-friendly interface; safety interlocks[3] |
| System components | — | Main measurement unit with integrated controls; control panel with pneumatic controls, pressure gauges, and safety switches; dedicated PC for data processing and analysis software; pneumatic air supply system with pressure regulation; safety systems including emergency stop control and safety interlocks[3] |
| Maim Measurement Unit | — | Primary sensor housing with integrated controls[3] |
| Control Panel | — | Pneumatic controls with pressure gauges and safety switches[3] |
| Computer System | — | Dedicated PC for data processing analysis software[3] |
| Pneumatic System | — | Air supply system with pressure regulation[3] |
| Safety Systems | — | Emergency stop control & safety interlocks[3] |
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