Comparison ledger
KLA .496 PSL Wafer, KLA Archer 100 Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA Archer |
| Specifications | ||
| Configuration | NIST Traceable[1] | Refurbished[3] |
| Wafer size | 8 inch[1] | 12 inch[4] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Manufacturer | — | KLA[4] |
| Model | — | Archer 100[4] |
| Design rule support | — | 45nm design rules and below[5] |
| Technology | — | advanced optical overlay metrology[5] |
| Capabilities | — | in-chip metrology and in-field analysis[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →