Comparison ledger
KLA .496 PSL Wafer, KLA INS 3000 Macro Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA INS 3000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | No HDD[3] |
| Wafer size | 8 inch[1] | 8 inch[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Loading Configuration | — | SMIF[3] |
| Number of Cassette Stations | — | 1[3] |
| Leica INS Series | — | INS-3000[3] |
| Microscope Objective Sizes | — | NA[3] |
| Make | — | KLA / Leica[3] |
| Model | — | INS 3000[3] |
| Series | — | INS-3000[3] |
| Cassette stations | — | 1[3] |
| DIC | — | No[3] |
| ADC | — | No[3] |
| OCR | — | No[3] |
| Loading configuration (example configuration) | — | SMIF (no cassette stations specified as 1)[3] |
| Illumination (example configuration) | — | Bright and dark field illumination, macro illumination[4] |
| Stage | — | Auto focus/motorized stage[4] |
| Microscope objectives | — | 2.5X, 5X, 10X, 20X, 50X, 100X[4] |
| Wobbler microscope inspection | — | Present (in one configuration)[4] |
| PC with Ethernet port and network card | — | Present (in one configuration)[4] |
| All cables present | — | Yes (in one configuration)[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →