Waferpedia

Comparison ledger

.496 PSL WaferversusEclipse LV 150

KLA .496 PSL Wafer, Nikon Eclipse LV 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferNikon Eclipse
Specifications
ConfigurationNIST Traceable[1]with accessories[3]
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]—
Make—Nikon[3]
Model—Eclipse LV 150[3]
Type—Microscope[3]
OEM—Nikon[3]
Equipment type—Microscope[3]
Description—Microscope with accessories[3]
Context—Metrology and inspection microscopy[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]epfl.chepfl.ch