Comparison ledger
KLA .496 PSL Wafer, Nikon Optistation 3200 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer Hander: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Nikon Optistation |
| Specifications | ||
| Configuration | NIST Traceable[1] | Pre-aligner[3] |
| Wafer size | 8 inch[1] | Wafer Hander:[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Loadport | — | 2 sets of 300mm (12inch) FOUP type[3] |
| Stage movement range | — | 0 to 300mm[3] |
| Objective | — | 5X, 10X, 20X, 50X, 100X, 150X[3] |
| Eyepiece | — | 10X[3] |
| Observation light | — | bright field, dark field[3] |
| Voltage | — | 200 V±10%, 50/60 Hz[3] |
| Phase | — | 3 kVA, 1 phase 3 wire[3] |
| Vacuum | — | -55~-75 kPa or greater[3] |
| Temperature | — | 20-25*C[3] |
| Relative Humidity | — | 40-60%[3] |
| Clearance | — | front:600, back:700, left:700, right:700[3] |
| Make | — | Nikon[3] |
| Model | — | Optistation 3200 Wafer[3] |
| Load port | — | 2 sets of 300mm (12inch) FOUP type[3] |
| Power | — | 200 V±10%, 50/60 Hz; 3 kVA; 1 phase 3 wire[3] |
| Flow | — | 30 NL/min, 1/4'' tube[3] |
| Total magnification | — | 25x to 1,500x[5] |
| Inspection modes | — | Brightfield, Darkfield, DIC (option), DUV (option)[5] |
| Autofocus | — | LED illumination slit projection[5] |
| Objectives | — | CFI60 objectives[5] |
| Macro inspection | — | Surface Macro, center backside Macro, perimeter backside Macro[5] |
| Wafer transfer | — | Robotic handling; vacuum chuck; noncontact pre-alignment mechanism[5] |
| Operation | — | Touch panel GUI, mouse, keyboard[5] |
| Options | — | DUV microscope; Hg-Xe lamp type (248nm)[5] |
| Online operation | — | Via SECS-I or HSMS[5] |
| Safety | — | S2-0302 compliance, CE marking compliance[5] |
| Ergonomic | — | S8-0701 compliance[5] |
| Dimensions | — | 1,625 x 2,500 x 2,300mm (Rear load port)[5] |
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