Comparison ledger
KLA .498 PSL Wafer, Olympus DSX-HRSU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DSX-HRSUOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Olympus DSX-HRSU |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| OEM | KLA[1] | — |
| Category | Metrology & Inspection[1] | — |
| Traceability | Yes[1] | — |
| Description | Particle-sizing calibration standard[1] | — |
| Optical Zoom | — | 13.5x[2] |
| Digital Zoom | — | Up to 30x[2] |
| Camera | — | 2.01 MP color CCD, Peltier cooled[2] |
| Equipment type | — | Microscope[2] |
| Zoom head | — | High-resolution zoom head[2] |
| Vintage | — | 2017[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →